replace deprecated make_directory with file(MAKE_DIRECTORY)

https://cmake.org/cmake/help/v3.14/command/make_directory.html

Author: e-kwsm

config/cmake/s-dftd3-utils.cmake

@@ -76,7 +76,7 @@ macro(
 
         # We need the module directory in the subproject before we finish the configure stage
         if(NOT EXISTS "${${_pkg_uc}_BINARY_DIR}/include")
-          make_directory("${${_pkg_uc}_BINARY_DIR}/include")
+          file(MAKE_DIRECTORY "${${_pkg_uc}_BINARY_DIR}/include")
         endif()
 
         break()
@@ -99,7 +99,7 @@ macro(
       # We need the module directory in the subproject before we finish the configure stage
       FetchContent_GetProperties("${_pkg_lc}" BINARY_DIR "${_pkg_uc}_BINARY_DIR")
       if(NOT EXISTS "${${_pkg_uc}_BINARY_DIR}/include")
-        make_directory("${${_pkg_uc}_BINARY_DIR}/include")
+        file(MAKE_DIRECTORY "${${_pkg_uc}_BINARY_DIR}/include")
       endif()
 
       break()