diff --git a/paddle/cinn/hlir/dialect/operator/ir/CMakeLists.txt b/paddle/cinn/hlir/dialect/operator/ir/CMakeLists.txt
index 56f9ab3d5ebe72..89e47a59b546b0 100644
--- a/paddle/cinn/hlir/dialect/operator/ir/CMakeLists.txt
+++ b/paddle/cinn/hlir/dialect/operator/ir/CMakeLists.txt
@@ -2,7 +2,7 @@
 # not found under CINN_ONLY mode
 if(NOT CINN_ONLY)
   set(CINN_DIALECT_SOURCE_DIR
-      "${PADDLE_SOURCE_DIR}/paddle/cinn/hlir/dialect/operator/ir")
+      "${PADDLE_BINARY_DIR}/paddle/cinn/hlir/dialect/operator/ir")
 
   # Generate cinn_op_dialect files defining op using op_gen_file
   set(cinn_op_gen_parsed_yaml_file
@@ -17,7 +17,7 @@ if(NOT CINN_ONLY)
   set(cinn_op_yaml_file
       ${PADDLE_SOURCE_DIR}/paddle/cinn/hlir/dialect/operator/ir/ops.yaml)
 
-  set(parsed_op_dir ${PADDLE_SOURCE_DIR}/paddle/cinn/hlir/dialect/generated)
+  set(parsed_op_dir ${PADDLE_BINARY_DIR}/paddle/cinn/hlir/dialect/generated)
 
   set(cinn_op_parsed_yaml_file ${parsed_op_dir}/ops.parsed.yaml)
 
diff --git a/paddle/fluid/operators/generator/CMakeLists.txt b/paddle/fluid/operators/generator/CMakeLists.txt
index f13cac6eec80c6..2e5525308de039 100644
--- a/paddle/fluid/operators/generator/CMakeLists.txt
+++ b/paddle/fluid/operators/generator/CMakeLists.txt
@@ -144,31 +144,46 @@ message(
 
 execute_process(
   WORKING_DIRECTORY ${CMAKE_SOURCE_DIR}/paddle/fluid/operators/generator
+  COMMAND ${CMAKE_COMMAND} -E make_directory
+          ${CMAKE_CURRENT_BINARY_DIR}/parsed_ops
   COMMAND ${PYTHON_EXECUTABLE} parse_op.py --op_yaml_path ${op_yaml_file}
-          --output_path ./parsed_ops/ops.parsed.yaml
-  COMMAND ${PYTHON_EXECUTABLE} parse_op.py --op_yaml_path ${legacy_op_yaml_file}
-          --output_path ./parsed_ops/legacy_ops.parsed.yaml
-  COMMAND ${PYTHON_EXECUTABLE} parse_op.py --op_yaml_path ${bw_op_yaml_file}
-          --output_path ./parsed_ops/backward_ops.parsed.yaml --backward
+          --output_path ${CMAKE_CURRENT_BINARY_DIR}/parsed_ops/ops.parsed.yaml
+  COMMAND
+    ${PYTHON_EXECUTABLE} parse_op.py --op_yaml_path ${legacy_op_yaml_file}
+    --output_path ${CMAKE_CURRENT_BINARY_DIR}/parsed_ops/legacy_ops.parsed.yaml
+  COMMAND
+    ${PYTHON_EXECUTABLE} parse_op.py --op_yaml_path ${bw_op_yaml_file}
+    --output_path
+    ${CMAKE_CURRENT_BINARY_DIR}/parsed_ops/backward_ops.parsed.yaml --backward
   COMMAND
     ${PYTHON_EXECUTABLE} parse_op.py --op_yaml_path ${legacy_bw_op_yaml_file}
-    --output_path ./parsed_ops/legacy_backward_ops.parsed.yaml --backward
-  COMMAND ${PYTHON_EXECUTABLE} parse_op.py --op_yaml_path ${static_op_yaml_file}
-          --output_path ./parsed_ops/static_ops.parsed.yaml
-  COMMAND ${PYTHON_EXECUTABLE} parse_op.py --op_yaml_path ${fused_op_yaml_file}
-          --output_path ./parsed_ops/fused_ops.parsed.yaml
-  COMMAND ${PYTHON_EXECUTABLE} parse_op.py --op_yaml_path ${sparse_op_yaml_file}
-          --output_path ./parsed_ops/sparse_ops.parsed.yaml
+    --output_path
+    ${CMAKE_CURRENT_BINARY_DIR}/parsed_ops/legacy_backward_ops.parsed.yaml
+    --backward
+  COMMAND
+    ${PYTHON_EXECUTABLE} parse_op.py --op_yaml_path ${static_op_yaml_file}
+    --output_path ${CMAKE_CURRENT_BINARY_DIR}/parsed_ops/static_ops.parsed.yaml
+  COMMAND
+    ${PYTHON_EXECUTABLE} parse_op.py --op_yaml_path ${fused_op_yaml_file}
+    --output_path ${CMAKE_CURRENT_BINARY_DIR}/parsed_ops/fused_ops.parsed.yaml
+  COMMAND
+    ${PYTHON_EXECUTABLE} parse_op.py --op_yaml_path ${sparse_op_yaml_file}
+    --output_path ${CMAKE_CURRENT_BINARY_DIR}/parsed_ops/sparse_ops.parsed.yaml
   COMMAND
     ${PYTHON_EXECUTABLE} parse_op.py --op_yaml_path ${sparse_bw_op_yaml_file}
-    --output_path ./parsed_ops/sparse_backward.parsed.yaml --backward
+    --output_path
+    ${CMAKE_CURRENT_BINARY_DIR}/parsed_ops/sparse_backward.parsed.yaml
+    --backward
   COMMAND
     ${PYTHON_EXECUTABLE} parse_op.py --op_yaml_path ${static_bw_op_yaml_file}
-    --output_path ./parsed_ops/static_backward.parsed.yaml --backward
+    --output_path
+    ${CMAKE_CURRENT_BINARY_DIR}/parsed_ops/static_backward.parsed.yaml
+    --backward
   COMMAND
     ${PYTHON_EXECUTABLE} parse_op.py --op_yaml_path ${fused_bw_op_yaml_file}
-    --output_path ./parsed_ops/fused_backward.parsed.yaml --backward
-    RESULTS_VARIABLE _results)
+    --output_path
+    ${CMAKE_CURRENT_BINARY_DIR}/parsed_ops/fused_backward.parsed.yaml
+    --backward RESULTS_VARIABLE _results)
 foreach(_result in ${_results})
   if(${_result})
     message(FATAL_ERROR "op yaml parsing failed, exiting.")
@@ -183,9 +198,11 @@ execute_process(
   WORKING_DIRECTORY ${CMAKE_SOURCE_DIR}/paddle/fluid/operators/generator
   COMMAND
     ${PYTHON_EXECUTABLE} cross_validate.py --forward_yaml_paths
-    ./parsed_ops/ops.parsed.yaml ./parsed_ops/legacy_ops.parsed.yaml
-    --backward_yaml_paths ./parsed_ops/backward_ops.parsed.yaml
-    ./parsed_ops/legacy_backward_ops.parsed.yaml
+    ${CMAKE_CURRENT_BINARY_DIR}/parsed_ops/ops.parsed.yaml
+    ${CMAKE_CURRENT_BINARY_DIR}/parsed_ops/legacy_ops.parsed.yaml
+    --backward_yaml_paths
+    ${CMAKE_CURRENT_BINARY_DIR}/parsed_ops/backward_ops.parsed.yaml
+    ${CMAKE_CURRENT_BINARY_DIR}/parsed_ops/legacy_backward_ops.parsed.yaml
   RESULT_VARIABLE _result)
 if(${_result})
   message(FATAL_ERROR "ops validation failed, exiting.")
@@ -195,8 +212,9 @@ execute_process(
   WORKING_DIRECTORY ${CMAKE_SOURCE_DIR}/paddle/fluid/operators/generator
   COMMAND
     ${PYTHON_EXECUTABLE} cross_validate.py --forward_yaml_paths
-    ./parsed_ops/static_ops.parsed.yaml --backward_yaml_paths
-    ./parsed_ops/static_backward.parsed.yaml
+    ${CMAKE_CURRENT_BINARY_DIR}/parsed_ops/static_ops.parsed.yaml
+    --backward_yaml_paths
+    ${CMAKE_CURRENT_BINARY_DIR}/parsed_ops/static_backward.parsed.yaml
   RESULT_VARIABLE _result)
 if(${_result})
   message(FATAL_ERROR "static ops validation failed, exiting.")
@@ -206,8 +224,9 @@ execute_process(
   WORKING_DIRECTORY ${CMAKE_SOURCE_DIR}/paddle/fluid/operators/generator
   COMMAND
     ${PYTHON_EXECUTABLE} cross_validate.py --forward_yaml_paths
-    ./parsed_ops/fused_ops.parsed.yaml --backward_yaml_paths
-    ./parsed_ops/fused_backward.parsed.yaml
+    ${CMAKE_CURRENT_BINARY_DIR}/parsed_ops/fused_ops.parsed.yaml
+    --backward_yaml_paths
+    ${CMAKE_CURRENT_BINARY_DIR}/parsed_ops/fused_backward.parsed.yaml
   RESULT_VARIABLE _result)
 if(${_result})
   message(FATAL_ERROR "fused ops validation failed, exiting.")
@@ -217,8 +236,9 @@ execute_process(
   WORKING_DIRECTORY ${CMAKE_SOURCE_DIR}/paddle/fluid/operators/generator
   COMMAND
     ${PYTHON_EXECUTABLE} cross_validate.py --forward_yaml_paths
-    ./parsed_ops/sparse_ops.parsed.yaml --backward_yaml_paths
-    ./parsed_ops/sparse_backward.parsed.yaml
+    ${CMAKE_CURRENT_BINARY_DIR}/parsed_ops/sparse_ops.parsed.yaml
+    --backward_yaml_paths
+    ${CMAKE_CURRENT_BINARY_DIR}/parsed_ops/sparse_backward.parsed.yaml
   RESULT_VARIABLE _result)
 if(${_result})
   message(FATAL_ERROR "sparse ops validation failed, exiting.")
@@ -233,8 +253,9 @@ execute_process(
   WORKING_DIRECTORY ${CMAKE_SOURCE_DIR}/paddle/fluid/operators/generator
   COMMAND
     ${PYTHON_EXECUTABLE} generate_op.py --ops_yaml_path
-    ./parsed_ops/ops.parsed.yaml --backward_yaml_path
-    ./parsed_ops/backward_ops.parsed.yaml --op_version_yaml_path
+    ${CMAKE_CURRENT_BINARY_DIR}/parsed_ops/ops.parsed.yaml --backward_yaml_path
+    ${CMAKE_CURRENT_BINARY_DIR}/parsed_ops/backward_ops.parsed.yaml
+    --op_version_yaml_path
     ${CMAKE_SOURCE_DIR}/paddle/phi/api/yaml/op_version.yaml
     --op_compat_yaml_path ${CMAKE_SOURCE_DIR}/paddle/phi/api/yaml/op_compat.yaml
     --output_op_path "${generated_op_path_1}.tmp" "${generated_op_path_2}.tmp"
@@ -249,8 +270,10 @@ execute_process(
   WORKING_DIRECTORY ${CMAKE_SOURCE_DIR}/paddle/fluid/operators/generator
   COMMAND
     ${PYTHON_EXECUTABLE} generate_op.py --ops_yaml_path
-    ./parsed_ops/static_ops.parsed.yaml --backward_yaml_path
-    ./parsed_ops/static_backward.parsed.yaml --op_version_yaml_path
+    ${CMAKE_CURRENT_BINARY_DIR}/parsed_ops/static_ops.parsed.yaml
+    --backward_yaml_path
+    ${CMAKE_CURRENT_BINARY_DIR}/parsed_ops/static_backward.parsed.yaml
+    --op_version_yaml_path
     ${CMAKE_SOURCE_DIR}/paddle/phi/api/yaml/op_version.yaml
     --op_compat_yaml_path ${CMAKE_SOURCE_DIR}/paddle/phi/api/yaml/op_compat.yaml
     --output_op_path "${generated_static_op_path}.tmp" --output_arg_map_path
@@ -264,8 +287,10 @@ execute_process(
   WORKING_DIRECTORY ${CMAKE_SOURCE_DIR}/paddle/fluid/operators/generator
   COMMAND
     ${PYTHON_EXECUTABLE} generate_op.py --ops_yaml_path
-    ./parsed_ops/fused_ops.parsed.yaml --backward_yaml_path
-    ./parsed_ops/fused_backward.parsed.yaml --op_version_yaml_path
+    ${CMAKE_CURRENT_BINARY_DIR}/parsed_ops/fused_ops.parsed.yaml
+    --backward_yaml_path
+    ${CMAKE_CURRENT_BINARY_DIR}/parsed_ops/fused_backward.parsed.yaml
+    --op_version_yaml_path
     ${CMAKE_SOURCE_DIR}/paddle/phi/api/yaml/op_version.yaml
     --op_compat_yaml_path ${CMAKE_SOURCE_DIR}/paddle/phi/api/yaml/op_compat.yaml
     --output_op_path "${generated_fused_op_path}.tmp" --output_arg_map_path
@@ -279,9 +304,10 @@ execute_process(
   WORKING_DIRECTORY ${CMAKE_SOURCE_DIR}/paddle/fluid/operators/generator
   COMMAND
     ${PYTHON_EXECUTABLE} generate_sparse_op.py --ops_yaml_path
-    ./parsed_ops/sparse_ops.parsed.yaml --backward_ops_yaml_path
-    ./parsed_ops/sparse_backward.parsed.yaml --output_op_path
-    "${generated_sparse_ops_path}.tmp" --output_arg_map_path
+    ${CMAKE_CURRENT_BINARY_DIR}/parsed_ops/sparse_ops.parsed.yaml
+    --backward_ops_yaml_path
+    ${CMAKE_CURRENT_BINARY_DIR}/parsed_ops/sparse_backward.parsed.yaml
+    --output_op_path "${generated_sparse_ops_path}.tmp" --output_arg_map_path
     "${generated_sparse_argument_mapping_path}.tmp"
   RESULT_VARIABLE _result)
 if(${_result})
diff --git a/paddle/fluid/pir/dialect/CMakeLists.txt b/paddle/fluid/pir/dialect/CMakeLists.txt
index 4734d247e858f6..d6726333ff55be 100644
--- a/paddle/fluid/pir/dialect/CMakeLists.txt
+++ b/paddle/fluid/pir/dialect/CMakeLists.txt
@@ -1,5 +1,5 @@
 set(PD_DIALECT_SOURCE_DIR
-    "${PADDLE_SOURCE_DIR}/paddle/fluid/pir/dialect/operator/ir")
+    "${PADDLE_BINARY_DIR}/paddle/fluid/pir/dialect/operator/ir")
 
 # Generate pd_op_dialect files defining op using op_gen_file
 set(op_gen_parsed_yaml_file
@@ -12,16 +12,16 @@ set(op_compat_yaml_file ${PADDLE_SOURCE_DIR}/paddle/phi/api/yaml/op_compat.yaml)
 
 # YAML files for defining operators
 set(op_fwd_yaml
-    ${PADDLE_SOURCE_DIR}/paddle/fluid/operators/generator/parsed_ops/ops.parsed.yaml
+    ${PADDLE_BINARY_DIR}/paddle/fluid/operators/generator/parsed_ops/ops.parsed.yaml
 )
 set(op_bwd_yaml
-    ${PADDLE_SOURCE_DIR}/paddle/fluid/operators/generator/parsed_ops/backward_ops.parsed.yaml
+    ${PADDLE_BINARY_DIR}/paddle/fluid/operators/generator/parsed_ops/backward_ops.parsed.yaml
 )
 set(fused_op_fwd_yaml
-    ${PADDLE_SOURCE_DIR}/paddle/fluid/operators/generator/parsed_ops/fused_ops.parsed.yaml
+    ${PADDLE_BINARY_DIR}/paddle/fluid/operators/generator/parsed_ops/fused_ops.parsed.yaml
 )
 set(fused_op_bwd_yaml
-    ${PADDLE_SOURCE_DIR}/paddle/fluid/operators/generator/parsed_ops/fused_backward.parsed.yaml
+    ${PADDLE_BINARY_DIR}/paddle/fluid/operators/generator/parsed_ops/fused_backward.parsed.yaml
 )
 set(pir_op_fwd_src_yaml
     ${PADDLE_SOURCE_DIR}/paddle/fluid/pir/dialect/operator/ir/ops.yaml)
@@ -31,7 +31,7 @@ set(pir_op_bwd_src_yaml
 set(pir_update_op_fwd_src_yaml
     ${PADDLE_SOURCE_DIR}/paddle/fluid/pir/dialect/operator/ir/update_ops.yaml)
 set(parsed_op_dir
-    ${PADDLE_SOURCE_DIR}/paddle/fluid/pir/dialect/operator/ir/generated)
+    ${PADDLE_BINARY_DIR}/paddle/fluid/pir/dialect/operator/ir/generated)
 set(pir_op_fwd_yaml ${parsed_op_dir}/ops.parsed.yaml)
 set(pir_op_bwd_yaml ${parsed_op_dir}/ops_backward.parsed.yaml)
 set(pir_update_op_fwd_yaml ${parsed_op_dir}/update_ops.parsed.yaml)
diff --git a/paddle/fluid/pir/drr/CMakeLists.txt b/paddle/fluid/pir/drr/CMakeLists.txt
index d35693c674c61f..1d676d9639f270 100644
--- a/paddle/fluid/pir/drr/CMakeLists.txt
+++ b/paddle/fluid/pir/drr/CMakeLists.txt
@@ -5,30 +5,30 @@ set(op_creator_gen_file
 )
 set(op_compat_yaml_file ${PADDLE_SOURCE_DIR}/paddle/phi/api/yaml/op_compat.yaml)
 set(op_forward_yaml_file1
-    ${PADDLE_SOURCE_DIR}/paddle/fluid/operators/generator/parsed_ops/ops.parsed.yaml
+    ${PADDLE_BINARY_DIR}/paddle/fluid/operators/generator/parsed_ops/ops.parsed.yaml
 )
 
 set(op_forward_yaml_file3
-    ${PADDLE_SOURCE_DIR}/paddle/fluid/operators/generator/parsed_ops/update_ops.parsed.yaml
+    ${PADDLE_BINARY_DIR}/paddle/fluid/operators/generator/parsed_ops/update_ops.parsed.yaml
 )
 set(op_backward_yaml_file1
-    ${PADDLE_SOURCE_DIR}/paddle/fluid/operators/generator/parsed_ops/backward_ops.parsed.yaml
+    ${PADDLE_BINARY_DIR}/paddle/fluid/operators/generator/parsed_ops/backward_ops.parsed.yaml
 )
 set(fused_op_forward_yaml_file
-    ${PADDLE_SOURCE_DIR}/paddle/fluid/operators/generator/parsed_ops/fused_ops.parsed.yaml
+    ${PADDLE_BINARY_DIR}/paddle/fluid/operators/generator/parsed_ops/fused_ops.parsed.yaml
 )
 set(fused_op_backward_yaml_file
-    ${PADDLE_SOURCE_DIR}/paddle/fluid/operators/generator/parsed_ops/fused_backward.parsed.yaml
+    ${PADDLE_BINARY_DIR}/paddle/fluid/operators/generator/parsed_ops/fused_backward.parsed.yaml
 )
 
 set(cinn_op_yaml_file
-    ${PADDLE_SOURCE_DIR}/paddle/cinn/hlir/dialect/generated/ops.parsed.yaml)
+    ${PADDLE_BINARY_DIR}/paddle/cinn/hlir/dialect/generated/ops.parsed.yaml)
 
 set(cinn_op_yaml_source_file
     ${PADDLE_SOURCE_DIR}/paddle/cinn/hlir/dialect/operator/ir/ops.yaml)
 
 set(parsed_op_dir
-    ${PADDLE_SOURCE_DIR}/paddle/fluid/pir/dialect/operator/ir/generated)
+    ${PADDLE_BINARY_DIR}/paddle/fluid/pir/dialect/operator/ir/generated)
 
 set(op_yaml_file3 ${parsed_op_dir}/ops.parsed.yaml)
 set(op_yaml_file4 ${parsed_op_dir}/ops_backward.parsed.yaml)
diff --git a/paddle/fluid/prim/api/auto_code_generated/CMakeLists.txt b/paddle/fluid/prim/api/auto_code_generated/CMakeLists.txt
index 4bfa314adfa36a..8a941e67b2329d 100644
--- a/paddle/fluid/prim/api/auto_code_generated/CMakeLists.txt
+++ b/paddle/fluid/prim/api/auto_code_generated/CMakeLists.txt
@@ -1,8 +1,8 @@
 set(api_yaml_path
-    "${PADDLE_SOURCE_DIR}/paddle/fluid/operators/generator/parsed_ops/ops.parsed.yaml"
+    "${PADDLE_BINARY_DIR}/paddle/fluid/operators/generator/parsed_ops/ops.parsed.yaml"
 )
 set(legacy_api_yaml_path
-    "${PADDLE_SOURCE_DIR}/paddle/fluid/operators/generator/parsed_ops/legacy_ops.parsed.yaml"
+    "${PADDLE_BINARY_DIR}/paddle/fluid/operators/generator/parsed_ops/legacy_ops.parsed.yaml"
 )
 set(api_compat_yaml_path
     "${PADDLE_SOURCE_DIR}/paddle/phi/api/yaml/op_compat.yaml")
diff --git a/paddle/fluid/primitive/backend/CMakeLists.txt b/paddle/fluid/primitive/backend/CMakeLists.txt
index 3e857778a4f144..91529ad5c4126b 100644
--- a/paddle/fluid/primitive/backend/CMakeLists.txt
+++ b/paddle/fluid/primitive/backend/CMakeLists.txt
@@ -1,5 +1,5 @@
 set(eager_backend_files
-    ${CMAKE_CURRENT_SOURCE_DIR}/generated/generated_eager_backend.cc)
+    ${CMAKE_CURRENT_BINARY_DIR}/generated/generated_eager_backend.cc)
 if(WITH_PYTHON OR NOT ON_INFER)
   cc_library(
     primitive_backend_eager_experimental
@@ -7,7 +7,7 @@ if(WITH_PYTHON OR NOT ON_INFER)
     DEPS final_dygraph_function eager_utils phi common)
 endif()
 set(static_backend_files
-    ${CMAKE_CURRENT_SOURCE_DIR}/generated/generated_static_backend.cc
+    ${CMAKE_CURRENT_BINARY_DIR}/generated/generated_static_backend.cc
     ${CMAKE_CURRENT_SOURCE_DIR}/manual/manual_static_backend.cc)
 cc_library(
   primitive_backend_static_experimental
diff --git a/paddle/fluid/primitive/codegen/CMakeLists.txt b/paddle/fluid/primitive/codegen/CMakeLists.txt
index 885fcb83dc38c1..87a10fa1aa1d8d 100644
--- a/paddle/fluid/primitive/codegen/CMakeLists.txt
+++ b/paddle/fluid/primitive/codegen/CMakeLists.txt
@@ -1,21 +1,21 @@
 set(parsed_yaml_path
-    "${PADDLE_SOURCE_DIR}/paddle/fluid/operators/generator/parsed_ops")
+    "${PADDLE_BINARY_DIR}/paddle/fluid/operators/generator/parsed_ops")
 set(fwd_path ${parsed_yaml_path}/ops.parsed.yaml)
 set(rev_path ${parsed_yaml_path}/backward_ops.parsed.yaml)
 set(fwd_pd_op_path
-    ${PADDLE_SOURCE_DIR}/paddle/fluid/pir/dialect/operator/ir/generated/ops.parsed.yaml
+    ${PADDLE_BINARY_DIR}/paddle/fluid/pir/dialect/operator/ir/generated/ops.parsed.yaml
 )
 set(update_fwd_pd_op_path
-    ${PADDLE_SOURCE_DIR}/paddle/fluid/pir/dialect/operator/ir/generated/update_ops.parsed.yaml
+    ${PADDLE_BINARY_DIR}/paddle/fluid/pir/dialect/operator/ir/generated/update_ops.parsed.yaml
 )
 set(rev_pd_op_path
-    ${PADDLE_SOURCE_DIR}/paddle/fluid/pir/dialect/operator/ir/generated/ops_backward.parsed.yaml
+    ${PADDLE_BINARY_DIR}/paddle/fluid/pir/dialect/operator/ir/generated/ops_backward.parsed.yaml
 )
 set(prim_path "${PADDLE_SOURCE_DIR}/paddle/fluid/primitive/primitive.yaml")
 set(templates_dir
     "${PADDLE_SOURCE_DIR}/paddle/fluid/primitive/codegen/templates/")
 set(compat_path "${PADDLE_SOURCE_DIR}/paddle/phi/api/yaml/op_compat.yaml")
-set(destination_dir "${PADDLE_SOURCE_DIR}/paddle/fluid/primitive/")
+set(destination_dir "${PADDLE_BINARY_DIR}/paddle/fluid/primitive/")
 set(scripts "${PADDLE_SOURCE_DIR}/paddle/fluid/primitive/codegen/gen.py")
 
 message("Automatic code generation for paddle/fluid/primitive")
@@ -42,7 +42,7 @@ execute_process(
     ${PADDLE_SOURCE_DIR}/paddle/fluid/primitive/codegen/decomp_gen.py --fwd_path
     ${fwd_path} --fwd_pd_op_path ${fwd_pd_op_path} --templates_dir
     ${templates_dir} --compat_path ${compat_path} --destination_dir
-    ${PADDLE_SOURCE_DIR}/paddle/fluid/pir/dialect/operator/ir/op_decomp.cc
+    ${PADDLE_BINARY_DIR}/paddle/fluid/pir/dialect/operator/ir/op_decomp.cc
   RESULT_VARIABLE _result)
 if(${_result})
   message(
diff --git a/paddle/fluid/primitive/rule/vjp/CMakeLists.txt b/paddle/fluid/primitive/rule/vjp/CMakeLists.txt
index c0f52d0d55df5f..e4b7b13e99c5d6 100644
--- a/paddle/fluid/primitive/rule/vjp/CMakeLists.txt
+++ b/paddle/fluid/primitive/rule/vjp/CMakeLists.txt
@@ -1,5 +1,5 @@
 set(VJP_SRCS
-    ${PADDLE_SOURCE_DIR}/paddle/fluid/primitive/rule/vjp/generated/generated_vjp.cc
+    ${PADDLE_BINARY_DIR}/paddle/fluid/primitive/rule/vjp/generated/generated_vjp.cc
     ${PADDLE_SOURCE_DIR}/paddle/fluid/primitive/rule/vjp/manual/manual_vjp.cc)
 cc_library(
   primitive_vjp_experimental